Small particles located on MEMS devices are significant causes of device rejection and yield loss. Cleaning is an essential process in order to prevent device failure due to foreign material.
Cleaning is an essential process for MEMS applications in order to prevent device failure due to foreign material. Small particles located on MEMS devices are significant causes of device rejection and yield loss. These issues affect inertial devices, such as accelerometers and gyroscopes, as well as microphones, laser bars and other MEMS devices.
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