Angstrom-Level Measurements With AFMs


Competition is heating up in the atomic force microscopy (AFM) market, where several vendors are shipping new AFM systems that address various metrology challenges in packaging, semiconductors and other fields. AFM, a small but growing field that has been under the radar, involves a standalone system that provides surface measurements on structures down to the angstrom level. (1 angstrom = 0... » read more

Specialty Technologies Bring New Functionality


As a materials engineer, I am very proud of the fact that key advances in human civilization have been driven by materials innovation. The stone age, bronze age, and iron age were all essential steps in setting the human race on the path that we are on today. Innovations are not without their downsides, but they have enabled progress in agriculture, medicine, transportation, communication, a... » read more

Process Variation Analysis Of Device Performance Using Virtual Fabrication — Methodology Demonstrated On A CMOS 14-nm FinFET Vehicle


A new methodology is demonstrated to assess the impact of fabrication inherent process variability on 14-nm fin field effect transistor (FinFET) device performance. A model of a FinFET device was built using virtual device fabrication and testing. The model was subsequently calibrated on Design of Experiment corner case data that had been collected on a limited number of processed fab wafers. W... » read more

Blog Review: Aug. 11


Arm's Rahul Mathur finds that traditional interconnects have become a bottleneck for improving IC performance and suggests buried interconnects as a way to lower signal routing delay. Cadence's Paul McLellan checks out forksheet FETs, a new transistor type that could allow scaling past 3nm, and the interconnect advances that will need to accompany it. A Synopsys writer explains the new LP... » read more

Week In Review: Manufacturing, Test


Chipmakers Taiwan’s Foxconn continues to expand its efforts in the semiconductor business. Foxconn has acquired a 6-inch wafer fab and the equipment from Taiwan’s Macronix for NT$2.52 billion (US$90.76 million). With the fab, Foxconn plans to enter the wideband gap semiconductor market, namely silicon carbide (SiC). SiC devices are used in electric vehicles, a market that Foxconn is making... » read more

Using A Virtual DOE To Predict Process Windows And Device Performance Of Advanced FinFET Technology


By Qingpeng Wang, Yu De Chen, Cheng Li, Rui Bao, Jacky Huang, and Joseph Ervin Introduction With continuing finFET device process scaling, micro loading control becomes increasingly important due to its significant impact on yield and device performance [1-2]. Micro-loading occurs when the local etch rate on a wafer is dependent upon existing feature sizes and local pattern density. Uninten... » read more

Week In Review: Manufacturing, Test


Chipmakers Intel has outlined its new process technology roadmap with plans to regain the leadership position in the market. As part of the move, Intel has changed the way it designates the nodes, revealed its new gate-all-around (GAA) transistor, and disclosed a customer for the GAA technology--Qualcomm. And not to be outdone, Intel has broadened its packaging portfolio. Intel is changing ... » read more

MEMS: New Materials, Markets And Packaging


Semiconductor Engineering sat down to talk about future developments and challenges for microelectromechanical systems (MEMS) with Gerold Schropfer, director of MEMS products and European operations in Lam Research's Computational Products group, and Michelle Bourke, senior director of strategic marketing for Lam's Customer Support Business Group. What follows are excerpts of that conversation.... » read more

Blog Review: July 28


Synopsys' Chris Clark considers potential vulnerabilities in automotive over-the-air updates and best practices and new standards the industry can implement to improve security of vehicle software updates. Cadence's Paul McLellan gets a look at expected new fab construction in the coming years and where capacity is being focused. Siemens' Robin Bornoff dives into electromagnetic simulatio... » read more

Week In Review: Manufacturing, Test


Chipmakers and OEMs The industry is still wondering if Intel will buy GlobalFoundries (GF). In the meantime, GF has announced a fab expansion plan in upstate New York. These plans include immediate investments at its existing Fab 8 facility as well as construction of a new fab on the same campus. That will double the capacity at the site. Intel has reported its second-quarter 2021 financial... » read more

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