tag: EUV

450mm: Out Of Sync
By Mark LaPedus - 18 Jul, 2013 - Comments: 0

By Mark LaPedus The IC industry has been talking about it for ages, but vendors are finally coming to terms with a monumental shift in the business. The vast changes involve a pending and critical juncture, where the 450mm wafer size transition, new device architectures and other technologies will likely converge at or near the same time. In one possible scenario, 450mm fabs are projected ... » read more

The Week In Review: July 15
By Mark LaPedus - 15 Jul, 2013 - Comments: 0

By Mark LaPedus There are more problems surfacing with extreme ultraviolet (EUV) lithography. Yes, the light source remains a problem, but the resists appear to be in decent shape. “The next challenge is the mask blank,” said Stefan Wurm, director of Sematech’s lithography program. The new problem involves ion beam deposition, which apparently is causing defects and overfill on EUV masks... » read more

Foundry Talk
By Ed Sperling - 07 Jul, 2013 - Comments: 0

GlobalFoundries CEO Ajit Manocha sounds off on Foundry 2.0, 450mm wafers, lithography challenges, stacked die, the Internet of Things and the rush to the next process node. [youtube vid=WfjtlZkCi0w] » read more

New Reliability Issues Emerge
By Ed Sperling - 27 Jun, 2013 - Comments: 0

By Ed Sperling Most consumers define reliability by whether a device turns on and works as planned, but the term is becoming harder to define as complexity increases and systems are interconnected. Adding more functionality in less space has made it more difficult to build complex chips, and it has made it more difficult to prevent problems in those chips. Verification coverage is a persist... » read more

Merchant Photomask Makers Remain Relevant
By Jeff Chappell - 20 Jun, 2013 - Comments: 0

By Jeff Chappell For many years the trend in the semiconductor industry with regard to photomasks and chipmakers was to shed captive mask operations in favor of merchant photomask suppliers. This reflected a larger trend all along the supply chain with many companies moving away from vertical integration as, consequently, the foundry model grew. "This was mainly driven by cost consideratio... » read more

The Shape Of Things To Come
By Ed Sperling - 13 Jun, 2013 - Comments: 0

By Ed Sperling The standard method of designing chips—by shrinking features and turning up the clock frequency—is running out of steam for many companies. It’s too difficult, too expensive, and without a commercially viable new lithography source it may become even more unrealistic for most applications. That certainly doesn’t mean Moore’s Law is ending, but it could become more o... » read more

Inside Leti’s Litho Lab
By Mark LaPedus - 16 May, 2013 - Comments: 0

By Mark LaPedus Semiconductor Manufacturing & Design sat down to discuss future lithography challenges with Serge Tedesco, lithography program manager at CEA-Leti; Laurent Pain, lithography lab manager at CEA-Leti; and Raluca Tiron, a senior scientist at CEA-Leti. SMD: CEA-Leti has two major and separate programs, including one in directed self-assembly (DSA) and another in multi-beam ... » read more

The Bumpy Road To 450mm
By Mark LaPedus - 16 May, 2013 - Comments: 0

By Mark LaPedus After its formation nearly 20 months ago, a 450mm consortium has reached its latest milestone by recently completing a cleanroom and installing the first 450mm demonstration tools in the facility. The so-called Global 450 Consortium (G450C) also has set a goal to bring 450mm fabs into high-volume manufacturing at the 10nm or 7nm nodes by 2018. That gives the industry a littl... » read more

EUV Flare And Proximity Modeling And Model-Based Correction
By Various Writers - 16 May, 2013 - Comments: 0

The introduction of EUV lithography into the semiconductor fabrication process will enable a continuation of Moore’s law below the 22 nm technology node. EUV lithography will, however, introduce new and unwanted sources of patterning distortions which must be accurately modeled and corrected on the reticle. Flare caused by scattered light in the projection optics is expected to result in seve... » read more

Throw In The Kitchen Sink
By Ed Sperling - 05 Apr, 2013 - Comments: 0

By Ed Sperling The number of options available for reducing power and improving performance are increasing for the first time in a decade. This is good news for chipmakers. It’s far less clear who stands to benefit on the tools, IP, capital equipment and manufacturing side. Choice is always a good thing in design. It allows teams to trade off one IP block for another, based upon the needs... » read more

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