Consortium Mania Sweeps 450mm Landscape


By Mark LaPedus In the mid-1990s, the semiconductor industry embarked on a costly and problematic migration from 200mm to 300mm wafer fabs. At the time, the 300mm development efforts were in the hands of two groups—Sematech and a Japanese-led entity. The equipment industry was on the outside looking in. And as a result, the migration from 200mm to 300mm fabs was out of sync and a nightma... » read more

Overcoming Shallow Trench Isolation


By Kathryn Ta To prevent electrical current leaking between adjacent transistors, state-of-the-art microchips feature shallow trench isolation (STI) to isolate transistors from each other. Key steps in the STI process involve etching a pattern of trenches in the silicon, depositing dielectric materials to fill the trenches, and removing the excess dielectric using technologies such as chemical... » read more

Extending Copper Interconnect Beyond The 14nm Node


Fabricating interconnects is one of the most process-intensive and cost-sensitive parts of manufacturing. To find out more about what's changing in this area and why it's so important, click here. » read more

3D NAND Market Heats Up


By Mark LaPedus It’s the tale of two promising and separate 3D chip architectures. One technology is slowly taking root, while the other one is heating up. 3D stacked-die using through-silicon vias (TSVs) is on the slower path. Advanced chip-stacking has several challenges and is still a few years away from mass production. In contrast, 3D NAND is heating up, as Samsung and SK Hynix are a... » read more

President Obama Visits Applied Materials


By John Kania [caption id="attachment_8398" align="alignnone" width="518" caption="Applied Materials CEO Mike Splinter with President Barack Obama as they tour the Austin manufacturing clean room and hear from Applied employee Nilam D. Bhakta-Sahib about the complex chip making process. "][/caption] President Obama rode Air Force One into Austin, Texas, to shine a spotlight on the import... » read more

Design-For-DSA Industry Begins To Assemble


By Mark LaPedus The industry is aggressively pursuing directed self-assembly (DSA) as an alternative patterning technology for future chip designs. DSA, which enables fine pitches through the use of block copolymers, is in the R&D pilot line stage today. The fab tools, process flows and materials are basically ready, but there are still several challenges to bring the technology from th... » read more

Foundry Models In Transition


By Jeff Chappell There may have been a time when AMD founder Jerry Sanders famous quote: "real men (i.e., real companies) have their own fabs” rang true, but in today's business climate it seems quaint at best. Fabless or fab-lite business models are more popular than ever today, while some IDMs have turned back the clock, so to speak, looking to improve capacity utilization and revenues ... » read more

Waiting For 3D Metrology


By Mark LaPedus Over the years, suppliers of metrology equipment have managed to meet the requirements for conventional planar chips. But tool vendors now find themselves behind in the emerging 3D chip era, prompting the urgent need for a new class of 3D metrology gear. 3D is a catch-all phrase that includes a range of new architectures, such as finFET transistors, 3D NAND and stacked-die ... » read more

Wanted: New Metrology Funding Models


By Mark LaPedus The shift toward the 20nm node and beyond will require new and major breakthroughs in chip manufacturing. Most of the attention centers around lithography, gate stacks, interconnects, strain engineering and design-for-manufacturing (DFM). Lost in the conversation are two other critical but overlooked pieces in the manufacturing puzzle—wafer inspection and metrology. ... » read more

Directed Self-Assembly Grows Up


By Mark LaPedus At last year’s SPIE Advanced Lithography conference, Christopher Bencher, a member of the technical staff at Applied Materials, said the buzz surrounding directed self-assembly (DSA) technology resembled the fervor generated at the famous Woodstock rock concert in 1969. This was clearly evident from the tumultuous and free-flowing movement that threatened the status quo o... » read more

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