An approach for full process control for the HVM of SRG waveguides, encompassing metal film metrology, OCD measurements of grating parameters, overlay alignment verification, and defect inspection.
From consumer products to industrial applications, augmented reality (AR)/mixed reality (MR) technology is one of the most innovative interactive technologies on the market today. By overlaying digital information onto the physical world, AR/MR technology improves how people see, understand, and interact with their environment in real time. The industrial applications alone are cause for celebration, whether this technology is being used for training, assembly, or troubleshooting.
Be that as it may, one of the most significant challenges facing AR/MR lies in manufacturing the photonic components that control how light is generated, diffracted, guided, and delivered to the human eye.
An AR display usually consists of a light engine and an optical combiner. The light engine serves as a display image source, while the combiner delivers the displayed images to the viewer’s eye and transmits environment light (Figure 1). Surface relief grating (SRG) waveguides play a role in these optical combiners by coupling display light into, expanding it within, and diffracting it out of a transparent substrate toward the eye of the intended viewer. This component must deliver precise diffraction behavior while remaining transparent, lightweight, and scalable for high-volume manufacturing (HVM).
Balancing optical performance and manufacturability, however, places significant demands on fabrication and process control. Faced with this obstacle, device makers require solutions capable of addressing any negative impacts to launch timelines, unit costs, and OEM qualification.
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Fig.1: Diagram of SRG waveguide-based AR display. Source Onto Innovation
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